HS-Series AFM Calibration Standards

The HS-series calibration standards offers an easy and reliable way to calibrate AFM systems. Primarily designed for accurate Z-axis calibration the standards also offer X- and Y-axis calibration for bigger scanners in the 40-100um range. The structure symmetry enables calibration without the need to rotate and re-align the sample in between x- and Y-axis calibration.
The HS-series feature silicon dioxide structure arrays on a 5x5mm silicon chip. The fabrication process ensures excellent uniformity of the structures across the chip. There are three step heights available with nominal values of: 20nm, 100nm, and 500nm. The actual value will be supplied with the delivered calibration standard. Arrays of structures with different shape and pitch are integrated on the chip. The larger square of 1 x 1mm contains square pillars and holes with a 10um pitch. The smaller center square of 500 x 500µm contains circular pillars and holes as well as lines in both X- and Y-direction with a 5um pitch.

HS-500MG - 3% height accuracy of the value that is handwritten on the label of the individual box.
HS-20MG - 2% height accuracy; 100 nanometer pitch (lateral) accuracy for all arrays
HS-100MG - 3% height accuracy; 100 nanometer pitch accuracy for all arrays
HS-500MG - 3% height accuracy; 100 nanometer pitch accuracy for all arrays
CS-20NG - 2% height accuracy; 100 nanometer pitch accuracy for the 5 micrometer and 10 micrometer pitch arrays, and 10 nanometer pitch accuracy for the 500 nanometer pitch array

The silicon chips are available unmounted or mounted on a 12mm standard AFM disc using a high quality electrically conductive epoxy.